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Consider the following statements—
1. The threshold voltage (VT) of a MOS capacitor decreases with increase in gate oxide thickness.
2. The threshold voltage (VT) of a MOS capacitor decreases with increase in substrate doping concentration. Which of the statements given above are correct.
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- 1 is FALSE and 2 is TRUE
- Both 1 and 2 are TRUE
- Both 1 and 2 are FALSE
- 1 is TRUE and 2 is FALSE
Correct Option: A
The threshold voltage of N-channel MOSFET is expressed by
VTN = | - | + φms + 2φfp | Cox | Cox |
Where, VTN = Threshold voltage for N-MOSFET
Q’ss = Electronic charge perunit area
φms = Work function difference
φfp = Surface potential

e = Charge of electron
∈s = Permitivity
Na = Acceptor ion concentration
Cox = | |
tox |
tox = gate oxide thickness
Thus on increasing gate oxide thickness. Cox decreases which increase threshold voltage, VTN.
And the threshold voltage VTN of a MOS capacitor with increase in substrate doping concentration increases,
since VTN α √Na
Hence alternative (A) is the correct choice.